검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulation of 3-Dimensional Refractory-Metal Step Coverage over Contact Cuts and Vias Sheergar MK, Smy T, Dew SK, Brett MJ Journal of Vacuum Science & Technology B, 14(4), 2595, 1996 |
| No. | Article |
|---|---|
| 1 |
Simulation of 3-Dimensional Refractory-Metal Step Coverage over Contact Cuts and Vias Sheergar MK, Smy T, Dew SK, Brett MJ Journal of Vacuum Science & Technology B, 14(4), 2595, 1996 |