검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Effect of resist surface characteristics on film-pulling velocity in immersion lithography Schuetter S, Shedd T, Nellis G, Romano A, Dammel R, Padmanaban M, Houlihan F, Krawicz A, Lin G, Rahman D, Chakrapani S, Neisser M, Van Peski C Journal of Vacuum Science & Technology B, 24(6), 2798, 2006 |
| 2 |
Control of the receding meniscus in immersion lithography Burnett H, Shedd T, Nellis G, El-Morsi M, Engelstad R, Garoff S, Varanasi K Journal of Vacuum Science & Technology B, 23(6), 2611, 2005 |
| 3 |
Static and dynamic contact angles of water on photoresist Burnett H, Shedd T, Nellis G, Van Peski C Journal of Vacuum Science & Technology B, 23(6), 2721, 2005 |