검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Step and flash imprint lithography: Template surface treatment and defect analysis Bailey T, Choi BJ, Colburn M, Meissl M, Shaya S, Ekerdt JG, Sreenivasan SV, Willson CG Journal of Vacuum Science & Technology B, 18(6), 3572, 2000 |