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| No. | Article |
|---|---|
| 1 |
Enhanced c-axis orientation of aluminum nitride thin films by plasma-based pre-conditioning of sapphire substrates for SAW applications Gillinger M, Shaposhnikov K, Knobloch T, Stoger-Pollach M, Artner W, Hradil K, Schneider M, Kaltenbacher M, Schmid U Applied Surface Science, 435, 432, 2018 |