검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Study of the Material Properties and Suitability of Plasma-Deposited Fluorine-Doped Silicon Dioxides for Low Dielectric-Constant Interlevel Dielectrics Shannon VL, Karim MZ Thin Solid Films, 270(1-2), 498, 1995 |
| No. | Article |
|---|---|
| 1 |
Study of the Material Properties and Suitability of Plasma-Deposited Fluorine-Doped Silicon Dioxides for Low Dielectric-Constant Interlevel Dielectrics Shannon VL, Karim MZ Thin Solid Films, 270(1-2), 498, 1995 |