검색결과 : 1건
No. | Article |
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1 |
Analysis of Aluminum Nitride Epitaxial-Growth by Low-Pressure Metal-Organic Chemical-Vapor-Deposition Buggeln RC, Meyyappan M, Shamroth SJ Journal of Vacuum Science & Technology A, 14(4), 2257, 1996 |
No. | Article |
---|---|
1 |
Analysis of Aluminum Nitride Epitaxial-Growth by Low-Pressure Metal-Organic Chemical-Vapor-Deposition Buggeln RC, Meyyappan M, Shamroth SJ Journal of Vacuum Science & Technology A, 14(4), 2257, 1996 |