검색결과 : 5건
| No. | Article |
|---|---|
| 1 |
Electron-electron interaction induced beam displacement in a multiple electron beam system Yu ML, Coyle ST, DeVore W, Shamoun B Journal of Vacuum Science & Technology B, 23(6), 2589, 2005 |
| 2 |
Progress toward a raster multibeam lithography tool Coyle ST, Shamoun B, Yu M, Maldonado J, Thomas T, Holmgren D, Chen X, Scheinfein MR, DeVore B, Gesley M Journal of Vacuum Science & Technology B, 22(2), 501, 2004 |
| 3 |
Cs halide photocathode for multi-electron-beam pattern generator Maldonado JR, Coyle ST, Shamoun B, Yu M, Gesley M, Pianetta P Journal of Vacuum Science & Technology B, 22(6), 3025, 2004 |
| 4 |
Prototype raster multibeam lithography tool Coyle ST, Holmgren D, Chen X, Thomas T, Sagle A, Maldonado J, Shamoun B, Allen P, Gesley M Journal of Vacuum Science & Technology B, 20(6), 2657, 2002 |
| 5 |
Assessment of thermal loading-induced distortions in optical photomasks due to e-beam multipass patterning Shamoun B, Engelstad R, Trost D Journal of Vacuum Science & Technology B, 16(6), 3558, 1998 |