화학공학소재연구정보센터
검색결과 : 7건
No. Article
1 Textured Ni(Pt) Germanosilicide Formation on a Condensed Si1-xGex/Si Substrate
Setiawan Y, Balakumar S, Tan EJ, Pey KL, Lee PS
Journal of the Electrochemical Society, 156(6), H500, 2009
2 Laser-induced melt-mediated Ni(Pt) germanosilicide formation on condensed Si1-xGex/Si substrates
Setiawan Y, Lee PS, Balakumar S, Pey KL, Wang XC
Electrochemical and Solid State Letters, 11(9), H262, 2008
3 Materials and electrical characterization of Er(Si1-xGex)(2-y) films formed on Si1-xGex(001) (x=0-0.3) via rapid thermal annealing
Tan EJ, Pey KL, Chi DZ, Lee PS, Setiawan Y, Hoe KM
Journal of the Electrochemical Society, 155(1), H26, 2008
4 Thermal stability of rare-earth based ultrathin Lu2O3 for high-k dielectrics
Darmawan P, Lee PS, Setiawan Y, Lai JC, Yang P
Journal of Vacuum Science & Technology B, 25(4), 1203, 2007
5 LaAlO3 nanocrystals embedded in amorphous Lu2O3 high-k gate dielectric for floating gate memory application
Yuan CL, Darmawan P, Setiawan Y, Lee PS
Electrochemical and Solid State Letters, 9(6), F53, 2006
6 Erbium silicidation on SiGe for advanced MOS application
Yiew QFD, Setiawan Y, Lee PS, Chi DZ
Thin Solid Films, 504(1-2), 91, 2006
7 Effect of Ti alloying in nickel silicide formation
Setiawan Y, Lee PS, Tan CW, Pey KL
Thin Solid Films, 504(1-2), 153, 2006