화학공학소재연구정보센터
검색결과 : 12건
No. Article
1 Abrupt Spin Transitions and LIESST Effects Observed in Fe-II Spin-crossover Complexes with Extended pi-Conjugated Schiff-base Ligands Having N4O2 Donor Sets
Kuroda-Sowa T, Yu Z, Senzaki Y, Sugimoto K, Maekawa M, Munakata M, Hayami S, Maeda Y
Chemistry Letters, 37(12), 1216, 2008
2 Temperature dependence of the work function of ruthenium-based gate electrodes
Alshareef HN, Wen HC, Luan HF, Choi K, Harris HR, Senzaki Y, Majhi P, Lee BH, Foran B, Lian G
Thin Solid Films, 515(4), 1294, 2006
3 Batch process for atomic layer deposition of hafnium silicate thin films on 300-mm-diameter silicon substrates
Okuyama Y, Barelli C, Tousseau C, Park S, Senzaki Y
Journal of Vacuum Science & Technology A, 23(3), L1, 2005
4 Atomic layer deposition of hafnium oxide and hafnium silicate thin films using liquid precursors and ozone
Senzaki Y, Park S, Chatham H, Bartholomew L, Nieveen W
Journal of Vacuum Science & Technology A, 22(4), 1175, 2004
5 Equivalent oxide thickness reduction of interpoly dielectric using ALD-Al2O3 for flash device application
Lee TP, Jang C, Haselden B, Dong M, Park S, Bartholomew L, Chatham H, Senzaki Y
Journal of Vacuum Science & Technology B, 22(5), 2295, 2004
6 Thermo-coloration of SmS thin flims by XPS in situ observation
Mori Y, Tanemura S, Koide S, Senzaki Y, Jin P, Kaneko K, Terai A, Nabotova-Gabin N
Applied Surface Science, 212, 38, 2003
7 Fabrication and characterization of metal and semiconductor SmS thin films by rf/dc dual magnetron sputtering
Tanemura S, Koide S, Senzaki Y, Miao L, Hirai H, Mori Y, Jin P, Kaneko K, Terai A, Nabatova-Gabain N
Applied Surface Science, 212, 279, 2003
8 Single-wafer hot wall rapid thermal processing for thin gate oxide films
Senzaki Y, Schaefer M, Sisson J, Barelli C, Bailey J, Herring R, Hayn R
Electrochemical and Solid State Letters, 5(5), F11, 2002
9 LPCVD of silicon nitride from dichlorosilane and ammonia by single wafer rapid thermal processing
Teasdale D, Senzaki Y, Herring R, Hoeye G, Page L, Schubert P
Electrochemical and Solid State Letters, 4(5), F11, 2001
10 CVD of Zr-Sn-Ti-O thin films by direct injection of solventless liquid precursor mixtures
Senzaki Y, Alers GB, Hochberg AK, Roberts DA, Norman JAT, Fleming RM, Krautter H
Electrochemical and Solid State Letters, 3(9), 435, 2000