검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dynamics of Ion-Assisted Etching in the Si(100)/Xef2/Ar+ System on a Time-Scale 100-Mu-S-1000-S Joosten GJ, Vugts MJ, Spruijt HJ, Senhorst HA, Beijerinck HC Journal of Vacuum Science & Technology A, 12(3), 636, 1994 |
| 2 |
Spontaneous Etching of Si(100) by Xef2 - Test-Case for a New Beam Surface Experiment Vugts MJ, Joosten GJ, Vanoosterum A, Senhorst HA, Beijerinck HC Journal of Vacuum Science & Technology A, 12(6), 2999, 1994 |