검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Temperature-Dependent Electron-Cyclotron-Resonance Etching of InP, Gap, and GaAs Shul RJ, Howard AJ, Vartuli CB, Barnes PA, Seng W Journal of Vacuum Science & Technology A, 14(3), 1102, 1996 |
| No. | Article |
|---|---|
| 1 |
Temperature-Dependent Electron-Cyclotron-Resonance Etching of InP, Gap, and GaAs Shul RJ, Howard AJ, Vartuli CB, Barnes PA, Seng W Journal of Vacuum Science & Technology A, 14(3), 1102, 1996 |