검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Dual exposure glass layer suspended structures: A simplified fabrication process for suspended nanostructures on planar substrates Tanenbaum DM, Olkhovets A, Sekaric L Journal of Vacuum Science & Technology B, 19(6), 2829, 2001 |
| 2 |
Measurement of nanomechanical resonant structures in single-crystal silicon Carr DW, Sekaric L, Craighead HG Journal of Vacuum Science & Technology B, 16(6), 3821, 1998 |