검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
AID of hafnium oxide thin film from tetrakis(ethylmethylamino)hafnium and ozone Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG Journal of the Electrochemical Society, 152(3), G213, 2005 |
| 2 |
ALD of hafnium oxide thin films from tetrakis(ethylmethylamino)hafnium and ozone (vol 152, pg G213, 2005) Liu XY, Ramanathan S, Longdergan A, Srivastava A, Lee E, Seidel TE, Barton JT, Pang D, Gordon RG Journal of the Electrochemical Society, 152(5), L9, 2005 |
| 3 |
Thin film atomic layer deposition equipment for semiconductor processing Sneh O, Clark-Phelps RB, Londergan AR, Winkler J, Seidel TE Thin Solid Films, 402(1-2), 248, 2002 |