검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Using a slit doser to probe gas dynamics during Al2O3 atomic layer deposition and to fabricate laterally graded Al2O3 layers Seghete D, Fabreguette FH, George SM Thin Solid Films, 519(11), 3612, 2011 |
| 2 |
Importance of Trimethylaluminum Diffusion in Three-Step ABC Molecular Layer Deposition Using Trimethylaluminum, Ethanolamine, and Maleic Anhydride Seghete D, Hall RA, Yoon B, George SM Langmuir, 26(24), 19045, 2010 |