검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Temperature gradients during absorber etching and their effect on x-ray mask patterning Pendharkar SV, Resnick DJ, Laudon MF, Dauksher WJ, Mangat PJS, Seese PA, Cummings KD Journal of Vacuum Science & Technology B, 16(6), 3500, 1998 |
| 2 |
Uniform low stress oxynitride films for application as hardmasks on x-ray masks Dauksher WJ, Resnick DJ, Smith SM, Pendharkar SV, Tompkins HG, Cummings KD, Seese PA, Mangat PJS, Chan JA Journal of Vacuum Science & Technology B, 15(6), 2232, 1997 |
| 3 |
The Effect of Aperturing on Radiation Damage-Induced Pattern Distortion of X-Ray Masks Resnick DJ, Cummings KD, Dauksher WJ, Johnson WA, Seese PA, Chen HT, Wells GM, Engelstad R, Cerrina F Journal of Vacuum Science & Technology B, 13(6), 3046, 1995 |
| 4 |
Effect of Brightener Concentration on the Thermal Distortion of Gold Plated X-Ray Masks Dauksher WJ, Resnick DJ, Seese PA, Cummings KD, Yanof AW, Johnson WA Journal of Vacuum Science & Technology B, 12(6), 3990, 1994 |