검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigations in the sheath region of a radio frequency biased inductively coupled discharge Benck EC, Schwabedissen A, Gates A, Roberts JR Journal of Vacuum Science & Technology A, 16(1), 306, 1998 |
| No. | Article |
|---|---|
| 1 |
Investigations in the sheath region of a radio frequency biased inductively coupled discharge Benck EC, Schwabedissen A, Gates A, Roberts JR Journal of Vacuum Science & Technology A, 16(1), 306, 1998 |