검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterization and metrology of the diffusion doped polysilicon using ellipsometry Asinovsky L, Schroth M, Shen F, Sweeney JJ Thin Solid Films, 313-314, 248, 1998 |
| 2 |
Characterization of the Low-Pressure Chemical-Vapor-Deposition Grown Rugged Polysilicon Surface Using Atomic-Force Microscopy Strausser YE, Schroth M, Sweeney JJ Journal of Vacuum Science & Technology A, 15(3), 1007, 1997 |