검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Silicon epitaxy by low-energy plasma enhanced chemical vapor deposition Rosenblad C, Deller HR, Dommann A, Meyer T, Schroeter P, von Kanel H Journal of Vacuum Science & Technology A, 16(5), 2785, 1998 |
| No. | Article |
|---|---|
| 1 |
Silicon epitaxy by low-energy plasma enhanced chemical vapor deposition Rosenblad C, Deller HR, Dommann A, Meyer T, Schroeter P, von Kanel H Journal of Vacuum Science & Technology A, 16(5), 2785, 1998 |