검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Effects of atomic hydrogen on the selective area growth of Si and Si1-xGex thin films on Si and SiO2 surfaces: Inhibition, nucleation, and growth Schroeder TW, Lam AM, Ma PF, Engstrom JR Journal of Vacuum Science & Technology A, 22(3), 578, 2004 |