검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Nanoimprint lithography stamp modification utilizing focused ion beams Wanzenboeck HD, Waid S, Bertagnolli E, Muehlberger M, Bergmair I, Schoeftner R Journal of Vacuum Science & Technology B, 27(6), 2679, 2009 |
| No. | Article |
|---|---|
| 1 |
Nanoimprint lithography stamp modification utilizing focused ion beams Wanzenboeck HD, Waid S, Bertagnolli E, Muehlberger M, Bergmair I, Schoeftner R Journal of Vacuum Science & Technology B, 27(6), 2679, 2009 |