검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization and operation of a mechanically actuated silicon microgripper Blideran MM, Fleischer M, Henschel W, Kern DP, Sterr J, Schock K, Kleindiek S, Langer MG, Loffler K, Grauvogel F Journal of Vacuum Science & Technology B, 24(6), 3239, 2006 |