검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Conformal aluminum oxide coating of high aspect ratio structures using metalorganic chemical vapor deposition Wiest F, Capodieci V, Blank O, Gutsche M, Schulze J, Eisele I, Matusche J, Schmidt UI Thin Solid Films, 496(2), 240, 2006 |
| 2 |
In-Situ Characterization of the Transient-Behavior of Particles in Low-Pressure Plasmas Schmidt UI, Graves DB Journal of Vacuum Science & Technology A, 14(2), 595, 1996 |