화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Structural investigation on the nature of surface defects present in silicon carbide wafers containing varying amount of micropipes
Shamsuzzoha M, Saddow SE, Schattner TE, Jin L, Dudley M, Rendakova SV, Dmitriev VA
Materials Science Forum, 338-3, 453, 2000
2 4H-SiC device scaling development on repaired micropipe substrates
Schattner TE, Casady JB, Smith MCD, Mazzola MS, Dimitriev VA, Rentakova SV, Saddow SE
Materials Science Forum, 338-3, 1203, 2000