검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Low bias reactive ion etching of GaAs with a SiCl4/N-2/O-2 time-multiplexed process Golka S, Schartner S, Schrenk W, Strasser G Journal of Vacuum Science & Technology B, 25(3), 839, 2007 |
| No. | Article |
|---|---|
| 1 |
Low bias reactive ion etching of GaAs with a SiCl4/N-2/O-2 time-multiplexed process Golka S, Schartner S, Schrenk W, Strasser G Journal of Vacuum Science & Technology B, 25(3), 839, 2007 |