| 1 |
Effect of thermal annealing on the structural and mechanical properties of amorphous silicon carbide films prepared by polymer-source chemical vapor deposition
Awad Y, El Khakani MA, Brassard D, Smirani R, Camire N, Lessard M, Aktik C, Scarlete M, Mouine J
Thin Solid Films, 518(10), 2738, 2010 |
| 2 |
Electrical characterization of amorphous silicon carbide thin films deposited via polymeric source chemical vapor deposition
Fanaei T, Camjre N, Aktik C, Gujrathi S, Lessard A, Awad Y, Oulachgar E, Scarlete M
Thin Solid Films, 516(12), 3755, 2008 |
| 3 |
Thermally induced interfacial interactions between. various metal substrates and a-SiC thin films deposited by a polymer-source chemical vapor deposition
Awad Y, Khakani MA, Aktik C, Mouine J, Camire N, Lessard M, Scarlete M
Materials Chemistry and Physics, 104(2-3), 350, 2007 |
| 4 |
Chemical and structural characterization of SiONC dielectric thin film deposited by PSCVD
Oulachgar EH, Aktik C, Dostie S, Sowerby R, Gujrathi S, Scarlete M
Journal of the Electrochemical Society, 153(11), F255, 2006 |
