화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 W and WC layers deposition by shielded inductively coupled plasma source
Colpo P, Meziani T, Sauvageot P, Ceccone G, Gibson PN, Rossi F, Monge-Cadet P
Journal of Vacuum Science & Technology A, 20(5), 1632, 2002
2 Characterization of zirconia coatings deposited by inductively coupled plasma assisted chemical vapor deposition
Colpo P, Ceccone G, Sauvageot P, Baker M, Rossi F
Journal of Vacuum Science & Technology A, 18(4), 1096, 2000