화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 A model for copper deposition in the damascene process - Application to the aging of the deposition bath
Gabrielli C, Mocoteguy P, Perrot H, Zdunek A, Sanz DN
Journal of the Electrochemical Society, 154(1), D13, 2007
2 Influence of the anode and the accelerator on copper bath aging in the damascene process
Mocoteguy P, Gabrielli C, Perrot H, Zdunek A, Sanz DN
Journal of the Electrochemical Society, 153(12), G1086, 2006
3 Density functional modeling of long range magnetic interactions in binuclear oxomolybdenum(V) complexes
Bencini A, Gatteschi D, Totti F, Sanz DN, Mc Cleverty JA, Ward MD
Journal of Physical Chemistry A, 102(51), 10545, 1998