검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Reduction of the phosphorous cross-contamination in n-i-p solar cells prepared in a single-chamber PECVD reactor Cubero O, Haug FJ, Ziegler Y, Sansonnens L, Couty P, Fischer D, Ballif C Solar Energy Materials and Solar Cells, 95(2), 606, 2011 |
| 2 |
Optimization of the microcrystalline silicon deposition efficiency Strahm B, Howling AA, Sansonnens L, Hollenstein C Journal of Vacuum Science & Technology A, 25(4), 1198, 2007 |
| 3 |
Microcrystalline silicon deposited at high rate on large areas from pure silane with efficient gas utilization Strahm B, Howling AA, Sansonnens L, Hollenstein C, Kroll U, Meier J, Ellert C, Feitknecht L, Ballif C Solar Energy Materials and Solar Cells, 91(6), 495, 2007 |
| 4 |
Electromagnetic sources of nonuniformity in large area capacitive reactors Howling AA, Sansonnens L, Hollenstein C Thin Solid Films, 515(12), 5059, 2007 |
| 5 |
Application of the shaped electrode technique to a large area rectangular capacitively coupled plasma reactor to suppress standing wave nonuniformity Sansonnens L, Schmidt H, Howling AA, Hollenstein C, Ellert C, Buechel A Journal of Vacuum Science & Technology A, 24(4), 1425, 2006 |
| 6 |
Measurements and consequences of nonuniform radio frequency plasma potential due to surface asymmetry in large area radio frequency capacitive reactors Sansonnens L, Strahm B, Derendinger L, Howling AA, Hollenstein C, Ellert C, Schmitt JPM Journal of Vacuum Science & Technology A, 23(4), 922, 2005 |
| 7 |
Uniformity study in large-area showerhead reactors Sobbia R, Sansonnens L, Bondkowski J Journal of Vacuum Science & Technology A, 23(4), 927, 2005 |
| 8 |
Development of a numerical simulation tool to study uniformity of large area PECVD film processing Sansonnens L, Bondkowski J, Mousel S, Schmitt JPM, Cassagne V Thin Solid Films, 427(1-2), 21, 2003 |
| 9 |
Anionic Clusters in Dusty Hydrocarbon and Silane Plasmas Hollenstein C, Schwarzenbach W, Howling AA, Courteille C, Dorier JL, Sansonnens L Journal of Vacuum Science & Technology A, 14(2), 535, 1996 |