검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
The reduction of the change of secondary ions yield in the thin SiON/Si system Sameshima J, Yamamoto H, Hasegawa T, Nishina T, Nishitani T, Yoshikawa K, Karen A Applied Surface Science, 252(19), 7190, 2006 |
| 2 |
Depth profiles of boron and nitrogen in SiON films by backside SIMS Sameshima J, Maeda R, Yamada K, Karen A, Yamada S Applied Surface Science, 231-2, 614, 2004 |
| 3 |
SIMS depth profile of copper in low-k dielectrics under electron irradiation for charge compensation Yamada K, Fujiyama N, Sameshima J, Kamoto R, Karen A Applied Surface Science, 203, 512, 2003 |