검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Investigation of Multipolar Electron-Cyclotron-Resonance Plasma Source Sensors and Models for Plasma Control Mak P, Tsai MH, Natarajan J, Wright BL, Grotjohn TA, Salam FM, Siegel M, Asmussen J Journal of Vacuum Science & Technology A, 14(3), 1894, 1996 |