화학공학소재연구정보센터
검색결과 : 25건
No. Article
1 Epitaxial formation of Ni germanide on Ge(001) substrate by reactive deposition
Deng Y, Nakatsuka O, Suzuki A, Sakashita M, Zaima S
Solid-State Electronics, 110, 44, 2015
2 Stabilized formation of tetragonal ZrO2 thin film with high permittivity
Kato K, Saito T, Shibayama S, Sakashita M, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Thin Solid Films, 557, 192, 2014
3 Importance of control of oxidant partial pressure on structural and electrical properties of Pr-oxide films
Kato K, Sakashita M, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Thin Solid Films, 557, 276, 2014
4 Impacts of AlGeO formation by post thermal oxidation of Al2O3/Ge structure on interfacial properties
Shibayama S, Kato K, Sakashita M, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Thin Solid Films, 557, 282, 2014
5 Effect of gate metal on chemical bonding state in metal/Pr-oxide/Ge gate stack structure
Kato K, Sakashita M, Takeuchi W, Taoka N, Nakatsuka O, Zaima S
Solid-State Electronics, 83, 56, 2013
6 Improvement of Al2O3/Ge interfacial properties by O-2-annealing
Shibayama S, Kato K, Sakashita M, Takeuchi W, Nakatsuka O, Zaima S
Thin Solid Films, 520(8), 3397, 2012
7 Control of interfacial properties of Pr-oxide/Ge gate stack structure by introduction of nitrogen
Kato K, Kondo H, Sakashita M, Nakatsuka O, Zaima S
Solid-State Electronics, 60(1), 70, 2011
8 Formation processes of Ge3N4 films by radical nitridation and their electrical properties
Kato K, Kondo H, Sakashita M, Zaima S
Thin Solid Films, 518, S226, 2010
9 Characterization of the Clathrate Hydrate Formed with Methane and Propan-1-ol
Yasuda K, Takeya S, Sakashita M, Yamawaki H, Ohmura R
Industrial & Engineering Chemistry Research, 48(20), 9335, 2009
10 Silicide and germanide technology for contacts and gates in MOSFET applications
Zaima S, Nakatsuka O, Kondo H, Sakashita M, Sakai A, Ogawa M
Thin Solid Films, 517(1), 80, 2008