검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Investigations on the mechanism of silicon etching with chlorine-trifluoride Hochst A, Fischer F, Kirbach G, Urban A, Becker V, Irmscher M, Sailer H, Kern DP Journal of Vacuum Science & Technology B, 23(5), 1936, 2005 |
| 2 |
High resolution electron beam lithography using a chemically amplified calix[4]arene based resist Sailer H, Ruderisch A, Henschel W, Schurig V, Kern DP Journal of Vacuum Science & Technology B, 22(6), 3485, 2004 |
| 3 |
Evaluation of calixarene-derivatives as high-resolution negative tone electron-beam resists Sailer H, Ruderisch A, Kern DP, Schurig V Journal of Vacuum Science & Technology B, 20(6), 2958, 2002 |