검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Self-aligned via and trench for metal contact in III-V semiconductor devices Zheng JF, Demir HV, Sabnis VA, Fidaner O, Harris JS, Miller DAB Journal of Vacuum Science & Technology B, 24(3), 1117, 2006 |
| No. | Article |
|---|---|
| 1 |
Self-aligned via and trench for metal contact in III-V semiconductor devices Zheng JF, Demir HV, Sabnis VA, Fidaner O, Harris JS, Miller DAB Journal of Vacuum Science & Technology B, 24(3), 1117, 2006 |