검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Simulation of dose uniformity for different pulse durations during inner surface plasma immersion ion implantation Liu AG, Wang XF, Wang SY, Tang BY, Chu PK, Zeng ZM, Tian XB Journal of Vacuum Science & Technology B, 17(2), 875, 1999 |