검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Process diagnostics and thickness metrology using in situ mass spectrometry for the chemical vapor deposition of W from H-2/WF6 Gougousi T, Xu YH, Kidder JN, Rubloff GW, Tilford CR Journal of Vacuum Science & Technology B, 18(3), 1352, 2000 |
| 2 |
On the Formation of Defects and Morphology During Chemical-Vapor-Deposition of Tungsten Wang JT, Cao CB, Wang H, Zhang SL Journal of the Electrochemical Society, 141(8), 2192, 1994 |