검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Role of oxygen in ion-enhanced etching of poly-Si and WSix with chlorine Kota GP, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 16(4), 2215, 1998 |
| No. | Article |
|---|---|
| 1 |
Role of oxygen in ion-enhanced etching of poly-Si and WSix with chlorine Kota GP, Coburn JW, Graves DB Journal of Vacuum Science & Technology A, 16(4), 2215, 1998 |