검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Particles in silicon deposition discharges Gallagher A, Bano G, Rozsa K Solar Energy Materials and Solar Cells, 78(1-4), 27, 2003 |
| 2 |
Real-time monitoring of scattered laser light by a single particle of several tens of nanometers in the etching chamber in relation to its status with the equipment Uesugi F, Ito N, Moriya T, Doi H, Sakamoto S, Hayashi Y Journal of Vacuum Science & Technology A, 16(3), 1189, 1998 |
| 3 |
Crystallization of Nanosized Silicon Powder Prepared by Plasma-Induced Clustering Reactions Dutta J, Hofmann H, Houriet R, Valmalette JC, Hofmeister H AIChE Journal, 43(11), 2610, 1997 |