| 1 |
Fluorination of Si(001)-2x1 surface near step edges: A mechanism for surface defect induced etching
Srivastava D, Halicioglu T, Schoolcraft TA
Journal of Vacuum Science & Technology A, 17(2), 657, 1999 |
| 2 |
Modeling of silicon deposition process scale-up employing axisymmetric ring nozzle sources. I
Chen G, Boyd ID
Journal of Vacuum Science & Technology A, 17(3), 970, 1999 |
| 3 |
Properties of Si1-xGex three-dimensional islands
Sullivan JS, Mateeva E, Evans H, Savage DE, Lagally MG
Journal of Vacuum Science & Technology A, 17(4), 2345, 1999 |
| 4 |
Nanostructure of Ge deposited on Si(001): a study by XPS peak shape analysis and AFM
Simonsen AC, Schleberger M, Tougaard S, Hansen JL, Larsen AN
Thin Solid Films, 338(1-2), 165, 1999 |
| 5 |
Thermal and excimer laser assisted growth of Si(1-x)Gex alloys from Si2H6 and GeH4 monitored by on line single wavelength ellipsometry and ex situ atomic force microscopy
Larciprete R, Cozzi S, Pieretti S, Padeletti G, Masetti E, Montecchi M
Journal of Vacuum Science & Technology A, 16(2), 644, 1998 |
| 6 |
Ellipsometric study of tellurium molecular beam interaction with dehydrogenated vicinal silicon surfaces
Shvets VA, Chikichev SI, Pridachin DN, Yakushev MV, Sidorov YG, Mardezhov AS
Thin Solid Films, 313-314, 561, 1998 |
| 7 |
Metal Pattern Fabrication Using the Local Electric-Field of a Conducting Atomic-Force Microscope Probe
Brandow SL, Calvert JM, Snow ES, Campbell PM
Journal of Vacuum Science & Technology A, 15(3), 1455, 1997 |
| 8 |
Molecular-Dynamics and Quasi-Dynamic Simulations of Low-Energy Particle Bombardment Effects During Vapor-Phase Crystal-Growth - 10-50 eV Si and in Atoms Incident on (2X1)-Terminated Si(001)
Kitabatake M, Greene JE
Thin Solid Films, 272(2), 271, 1996 |
| 9 |
Low-Energy (5-Less-Than-E(I)Less-Than-100 eV), High-Brightness, Ultrahigh-Vacuum Ion-Source for Primary Ion-Beam Deposition - Applications for Al and Ge
Kim YW, Petrov I, Ito H, Greene JE
Journal of Vacuum Science & Technology A, 13(6), 2836, 1995 |
| 10 |
Ag on Si(001)(2X1) Formation of a 2X3 Superstructure
Winau D, Itoh H, Schmid AK, Ichinokawa T
Journal of Vacuum Science & Technology B, 12(3), 2082, 1994 |
