검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Laser-induced thermal desorption analysis of the surface during Ge etching in a Cl-2 inductively coupled plasma Choe JY, Herman IP, Donnelly VM Journal of Vacuum Science & Technology A, 16(6), 3266, 1998 |
| No. | Article |
|---|---|
| 1 |
Laser-induced thermal desorption analysis of the surface during Ge etching in a Cl-2 inductively coupled plasma Choe JY, Herman IP, Donnelly VM Journal of Vacuum Science & Technology A, 16(6), 3266, 1998 |