검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Photoconductivity characterization of silicon wafer mirror-polishing subsurface damage related to gate oxide integrity Ogita Y, Kobayashi K, Daio H Journal of Crystal Growth, 210(1-3), 36, 2000 |
| No. | Article |
|---|---|
| 1 |
Photoconductivity characterization of silicon wafer mirror-polishing subsurface damage related to gate oxide integrity Ogita Y, Kobayashi K, Daio H Journal of Crystal Growth, 210(1-3), 36, 2000 |