화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 The optimization of incident angles of low-energy oxygen ion beams for increasing sputtering rate on silicon samples
Sasaki T, Yoshida N, Takahashi M, Tomita M
Applied Surface Science, 255(4), 1357, 2008
2 Surface Passivation of In0.53Ga0.47As Ridge Quantum Wires Using Silicon Interface Control Layers
Fujikura H, Kodama S, Hashizume T, Hasegawa H
Journal of Vacuum Science & Technology B, 14(4), 2888, 1996