화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Temperature coefficient of resistivity in heavily doped oxygen-rich polysilicon
Rydberg M, Smith U
Journal of the Electrochemical Society, 148(12), G725, 2001
2 Influence on the long-term stability of polysilicon resistors from traces of titanium and tungsten
Rydberg M, Smith U
Journal of the Electrochemical Society, 147(9), 3487, 2000
3 Effect of post-nitride-passivation processing on the long-term stability of polysilicon integrated circuit resistors
Rydberg M, Smith U, Sjodin H
Journal of Vacuum Science & Technology B, 18(2), 690, 2000