검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High aspect ratio Bosch etching of sub-0.25 mu m trenches for hyperintegration applications Wang X, Zeng W, Lu G, Russo OL, Eisenbraun E Journal of Vacuum Science & Technology B, 25(4), 1376, 2007 |
| No. | Article |
|---|---|
| 1 |
High aspect ratio Bosch etching of sub-0.25 mu m trenches for hyperintegration applications Wang X, Zeng W, Lu G, Russo OL, Eisenbraun E Journal of Vacuum Science & Technology B, 25(4), 1376, 2007 |