검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Properties of ultralow energy boron implants using octadecaborane Ameen MS, Rubin LM, Harris MA, Huynh C Journal of Vacuum Science & Technology B, 26(1), 373, 2008 |
| 2 |
Influence of low temperature preanneals on dopant and defect behavior for low energy Ge preamorphized silicon Camillo-Castillo RA, Law ME, Jones KS, Rubin LM Journal of Vacuum Science & Technology B, 22(1), 312, 2004 |