검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Construction of an atomic layer deposition system for nano-device applications Noh SJ, Lee SK, Kim EH, Kong YJ Current Applied Physics, 6(2), 171, 2006 |
| 2 |
Characteristics of sputter-deposited Ru thin films on Si substrates Lee HY, Hsieh YW, Hsu CH, Liang KS Materials Chemistry and Physics, 82(3), 984, 2003 |