검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Enhancement of Ru nucleation by pretreatments of the underlying TaSiN film surface in Ru MOCVD Lim J, Park H, Lee C Thin Solid Films, 475(1-2), 194, 2005 |
| No. | Article |
|---|---|
| 1 |
Enhancement of Ru nucleation by pretreatments of the underlying TaSiN film surface in Ru MOCVD Lim J, Park H, Lee C Thin Solid Films, 475(1-2), 194, 2005 |