검색결과 : 1건
No. | Article |
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1 |
Irradiation and humidity effects on the leakage current in SiOx(CH3)y-based intermetal dielectric films Devine RAB, Ball D, Rowe JD, Tringe JW Journal of the Electrochemical Society, 150(8), F151, 2003 |
No. | Article |
---|---|
1 |
Irradiation and humidity effects on the leakage current in SiOx(CH3)y-based intermetal dielectric films Devine RAB, Ball D, Rowe JD, Tringe JW Journal of the Electrochemical Society, 150(8), F151, 2003 |