검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Properties and growth peculiarities of Si0.30Ge0.70 stressor integrated in 14 nm fin-based p-type metal-oxide-semiconductor field-effect transistors Hikavyy A, Rosseel E, Kubicek S, Mannaert G, Favia P, Bender H, Loo R, Horiguchi N Thin Solid Films, 602, 72, 2016 |
| 2 |
Chemical vapor deposition of Si:C and Si:C:P films-Evaluation of material quality as a function of C content, carrier gas and doping Dhayalan SK, Loo R, Hikavyy A, Rosseel E, Bender H, Richard O, Vandervorst W Journal of Crystal Growth, 426, 75, 2015 |
| 3 |
Ultra Shallow Arsenic Junctions in Germanium Formed by Millisecond Laser Annealing Hellings G, Rosseel E, Simoen E, Radisic D, Petersen DH, Hansen O, Nielsen PF, Zschatzsch G, Nazir A, Clarysse T, Vandervorst W, Hoffmann TY, De Meyer K Electrochemical and Solid State Letters, 14(1), II39, 2011 |
| 4 |
Atomic Layer Deposition of Gd-Doped HfO2 Thin Films Adelmann C, Tielens H, Dewulf D, Hardy A, Pierreux D, Swerts J, Rosseel E, Shi X, Van Bael MK, Kittl JA, Van Elshocht S Journal of the Electrochemical Society, 157(4), G105, 2010 |
| 5 |
Metrology for Implanted Si Substrate Loss Studies Radisic D, Shamiryan D, Mannaert G, Boullart W, Rosseel E, Bogdanowicz J, Goossens J, Marrant K, Bender H, Sonnemans R, Berry I Journal of the Electrochemical Society, 157(5), H580, 2010 |
| 6 |
Nondestructive extraction of junction depths of active doping profiles from photomodulated optical reflectance offset curves Bogdanowicz J, Dortu F, Clarysse T, Vandervorst W, Rosseel E, Nguyen ND, Shaughnessy D, Salnik A, Nicolaides L Journal of Vacuum Science & Technology B, 28(1), C1C1, 2010 |
| 7 |
Study of submelt laser induced junction nonuniformities using Therma-Probe Rosseel E, Bogdanowicz J, Clarysse T, Vandervorst W, Ortolland C, Hoffmann T, Salnik A, Nicolaides L, Han SH, Petersen DH, Lin R, Hansen O Journal of Vacuum Science & Technology B, 28(1), C1C21, 2010 |
| 8 |
Review of electrical characterization of ultra-shallow junctions with micro four-point probes Petersen DH, Hansen O, Hansen TM, Boggild P, Lin R, Kjaer D, Nielsen PF, Clarysse T, Vandervorst W, Rosseel E, Bennett NS, Cowern NEB Journal of Vacuum Science & Technology B, 28(1), C1C27, 2010 |
| 9 |
Use of p- and n-type vapor phase doping and sub-melt laser anneal for extension junctions in sub-32 nm CMOS technology Nguyen ND, Rosseel E, Takeuchi S, Everaert JL, Yang L, Goossens J, Moussa A, Clarysse T, Richard O, Bender H, Zaima S, Sakai A, Loo R, Lin JC, Vandervorst W, Caymax M Thin Solid Films, 518, S48, 2010 |
| 10 |
Comparative study of size dependent four-point probe sheet resistance measurement on laser annealed ultra-shallow junctions Petersen DH, Lin R, Hansen TM, Rosseel E, Vandervorst W, Markvardsen C, Kjaer D, Nielsen PF Journal of Vacuum Science & Technology B, 26(1), 362, 2008 |