검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Printability of nonsmoothed buried defects in extreme ultraviolet lithography mask blanks Farys V, Charpin-Nicolle C, Richard M, Robic JY, Muffato V, Quesnel E, Postnikov S, Schiavone P, Besacier M, Smaali R, Naulleau P Journal of Vacuum Science & Technology B, 23(6), 2860, 2005 |
| 2 |
Characterization of magnesium fluoride thin films produced by argon ion beam-assisted deposition Dumas L, Quesnel E, Robic JY, Pauleau Y Thin Solid Films, 382(1-2), 61, 2001 |
| 3 |
Characterization of magnesium fluoride thin films deposited by direct electron beam evaporation Dumas L, Quesnel E, Robic JY, Pauleau Y Journal of Vacuum Science & Technology A, 18(2), 465, 2000 |
| 4 |
Residual-Stress in Silicon Dioxide Thin-Films Produced by Ion-Assisted Deposition Robic JY, Leplan H, Pauleau Y, Rafin B Thin Solid Films, 290-291, 34, 1996 |