검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Optical monitoring of capacitance in hemispherical grain polycrystalline silicon for advanced dynamic random access memory application Lee SB, Kim JO, Ritz KN, Opsal J, Oh HJ, Woo SH, Shin SW, Han IK, Yang HS Journal of the Electrochemical Society, 145(11), 3935, 1998 |